首页> 外国专利> INORGANIC MATERIAL LAYER USING PHOTOSENSITIVE COMPOSITION CONTAINING AT LEAST TWO KINDS OF DIFFERENT INORGANIC POWDERS HAVING DIFFERENT AVERAGE DIAMETER AND SOFTENING POINT, INORGANIC MATERIAL LAYER STRUCTURE USING THE INORGANIC MATERIAL LAYER, PREPARATION METHOD THEREOF AND TRANSFER FILM USING THE PHOTOSENSITIVE COMPOSITION

INORGANIC MATERIAL LAYER USING PHOTOSENSITIVE COMPOSITION CONTAINING AT LEAST TWO KINDS OF DIFFERENT INORGANIC POWDERS HAVING DIFFERENT AVERAGE DIAMETER AND SOFTENING POINT, INORGANIC MATERIAL LAYER STRUCTURE USING THE INORGANIC MATERIAL LAYER, PREPARATION METHOD THEREOF AND TRANSFER FILM USING THE PHOTOSENSITIVE COMPOSITION

机译:使用至少包含两种平均直径和软化点不同的两种不同粉末的光敏组合物的无机材料层,使用该材料的无机层,使用该方法的纳米粉体,制备方法

摘要

PURPOSE: Provided are an inorganic material layer which has a low dielectric constant and a highly precise microstructure and is almost free from the change of line width or layer thickness of a pattern of partition walls or dielectrics after sintering, an inorganic material layer structure using the inorganic material layer, its preparation method and a transfer film. CONSTITUTION: The inorganic material layer is a porous inorganic material layer obtained by sintering a photosensitive composition containing at least an inorganic powder, wherein the inorganic material layer has a pore area rate of 5-75 % and a pore size of 0.1-30 micrometers. Preferably the photosensitive composition comprises a hydrophilic group-substituted or unsubstituted cellulose derivative, a sensitizer, and a radiation curing agent. Preferably the inorganic powder comprises at least two kinds of inorganic powders whose an average diameter and a softening point are in a high rank, and the powder with a large average diameter has a higher softening point.
机译:目的:提供一种无机材料层,其具有低介电常数和高度精确的微观结构,并且几乎没有烧结后的间隔壁或电介质图案的线宽或层厚度的变化。无机材料层,其制备方法和转移膜。组成:无机材料层是多孔无机材料层,通过烧结至少包含无机粉末的光敏组合物获得,其中无机材料层的孔隙率为5-75%,孔径为0.1-30微米。优选地,光敏组合物包含亲水基取代或未取代的纤维素衍生物,敏化剂和辐射固化剂。优选地,无机粉末包括至少两种平均直径和软化点处于高等级的无机粉末,并且具有大平均直径的粉末具有更高的软化点。

著录项

  • 公开/公告号KR20040100957A

    专利类型

  • 公开/公告日2004-12-02

    原文格式PDF

  • 申请/专利权人 FUJI FILM ARCH CO. LTD.;

    申请/专利号KR20040035155

  • 发明设计人 TAKAGI YOSHIHIRO;

    申请日2004-05-18

  • 分类号G03F7/004;

  • 国家 KR

  • 入库时间 2022-08-21 22:06:27

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