CMOS-compatible position-sensitive devices (PSDs) based on photodetector arrays

摘要

This paper reports five different constructions of optical position-sensitive devices (PSDs) implemented using standard CMOS technology. It is found that despite the non-idealities of CMOS-compatible photodetectors, CMOS technology provides a means of implementing PSDs with relatively high performance. This can be achieved, for example, by using an array of discrete photodetectors instead of the continuous single element structure used in conventional lateral effect PSDs (LEPs). The results show that, relative to a conventional LEP manufactured with dedicated technology, the linearity of an array-type two-axis CMOS PSD can be two to eight times better, and that its precision in low bandwidth (<10 kHz) applications can be 1.4 to 40 times better. (C) 2003 Elsevier B.V. All rights reserved. [References: 22]