Applications of a high accuracy optical fiber displacement sensor to vibrometry and profilometry

摘要

This paper shows the use of an extrinsic optical fiber displacement sensor as a low cost vibrometer and profilometer. Results obtained with our sensor are compared respectively to those given by a piezoelectric accelerometer and by a white-light interferometric microscope. Calibration step shows that the sensitivity of the optical fiber sensor is 77 muVm for the 140-220 mum range over a dynamic bandwidth of 8.5 kHz. The achieved resolution of the sensor is 1 nm/rootHz. The light source feed circuit is designed to reduce drifts. The short time stability of the sensor is 3 x 10(-5) over 77 s in relative value. (C) 2004 Elsevier B.V. All rights reserved.