Variable Capacitance Accelerometers: Design and Applications

摘要

Micromachined silicon variable-capacitance accelerometers are designed for easy manufacture and demanding applications. All variable capacitance accelerometers have certain basic design elements in common. They incorporate a seismic mass whose motion in response to shock or vibration lags behind that of the accelerometer housing. The capacitor consists of two plates, one attached to the outer frame and therefore stationary and the other attached to the seismic, or inertial, mass. The value of this capacitor is a function of the distance between the plates, which varies with the motion of the seismic mass.