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Miniaturized magnetostrictive delay line arrangement using multilayer-like structure

机译:使用多层状结构的微型磁致伸缩延迟线布置

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摘要

In this paper it is reported a special technological solution to improve the performance and to simplify the fabrication process of the miniaturized magnetostrictive delay line (MDL) obtained by thin films technology. In order to increase the sensitivity level without adding new difficulties in the reliability of the sensing element, we conceived and realized a new configuration of miniaturized MDL using a magnetoresistive sensing three-layered structure. According to this configuration, MDL arrangement can be miniaturized, without the use of the receiving coil fabricated by thin film technology and photolithographic techniques, allowing thus a simple fabrication process and a high output signal level.
机译:在本文中,报道了一种特殊的技术解决方案,该技术解决方案可提高性能并简化通过薄膜技术获得的微型磁致伸缩延迟线(MDL)的制造工艺。为了在不增加感测元件可靠性的新困难的情况下提高灵敏度水平,我们构思并实现了使用磁阻感测三层结构的新型微型MDL配置。根据该配置,可以不使用通过薄膜技术和光刻技术制造的接收线圈来使MDL布置最小化,从而允许简单的制造过程和高输出信号电平。

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