Development of high performance piezoelectric d_(33) mode MEMS vibration energy harvester based on PMN-PT single crystal thick film

摘要

In this paper, we present the development of the d_(33) mode piezoelectric MEMS energy harvester, which is made of composite cantilever beams from single crystal PMN-PT thick film, and silicon layer. The PMN-PT piezoelectric thick film is deployed to improve the coupling coefficient and electromechanical coefficient. The d_(33) mode harvester based on interdigital electrodes contributes to improve its energy conversion efficiency. The hybrid processes composed of wafer bonding and mechanical lapping for thinning is successfully developed to prepare the PMN-PT thick film. The experimental results show that the fabricated prototype excited at 1.5 g vibration level can generate a maximum output voltage of 5.36 Vp_p and corresponding power of 7.182 μW at the resonant frequency of 406.0 Hz. The power density is calculated as 17,181.8 μWcm~(-3), which is superior to the devices fabricated by other technologies in the reported literature.