This paper presents valve-less diffuser micropumps fabricated using thermoplastic replication. Thermoplastic replication is very suitable for a valve-less diffuser pump due to its simple planar geometry. Two different thermoplastic replication methods have been tested: hot embossing and injection molding. We use 0.1 and 0.2 mm deep precision-milled brass mold inserts and 20 and 80 μm deep microelectroformed nickel mold inserts defined from deep reactive ion etched (DRIE) silicon wafers. For the injection molding a commercially available compact disc injection-molding machine (Toolex Alpha MD 100) is used to fabricate the diffuser micropumps. The cycle times are extremely short, less than 10 s per disc, and one properly fabricated nickel mold insert can be used to fabricate more than 10 000 plastic discs. The plastic cost is about 5 cents per disc. Tested pumps reach a maximum volume flow of 1.2 mi min↑(-1) and a maximum pump pressure of th. # 1998 Elsevier Science S.A.
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机译：本文介绍了使用热塑性塑料复制品制造的无阀扩散器微型泵。由于其简单的平面几何形状，热塑性复制非常适合无阀扩散泵。测试了两种不同的热塑性复制方法：热压花和注塑。我们使用0.1毫米和0.2毫米深的精密铣削黄铜模具插件以及20毫米和80微米深的微电铸镍模具插件，它们是由深反应离子刻蚀（DRIE）硅晶片定义的。对于注射成型，使用市售的光盘注射成型机（Toolex Alpha MD 100）来制造扩散器微型泵。周期时间非常短，每个盘不到10 s，并且可以使用一个正确制作的镍模具插入物来制造超过10000个塑料盘。每张光盘的塑料成本约为5美分。经过测试的泵的最大流量为1.2 mi min ^（-1），最大泵压力为th。 ＃1998 Elsevier Science S.A.
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