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Wet microelectronic technologies on paper substrate for flexible electronic applications

机译:纸基板上的湿微电子技术可用于柔性电子应用

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Flexible electronics on paper is currently a challenging area of research. The use of an economical and ecological substrate, such as paper, has significant potential compared to a plastic substrate, such as PET (Polyethylene Terephthalate) or Kapton (Polyimide). However, the roughness and tearing of paper due to moisture and temperature during operation constitute major technical challenges, considering the potential application in electronics. The use of printing techniques, such as gravure, flexographic, screen, offset, inkjet, conductive and dielectric inks, and organic polymers, all of which have different viscosities suitable for machine deposition, may allow to electronic devices on a paper substrate; example products using this technology include flexible batteries, solar cell, displays, and biomedical devices. This technology only presents a small number of disadvantages, which include poor conductivity, expensive materials, and difficulties with subtractive batch processes, such as photolithography and vacuum processes. In this article, the authors chose an unconventional way to reduce the impact of these disadvantages by adapting technological processes of microelectronics (i.e., photolithography, metal vapour deposition, electroplating, and etching) for use on a standard paper substrate. (C) 2015 Elsevier B.V. All rights reserved.
机译:纸上柔性电子设备目前是一个充满挑战的研究领域。与塑料基板(例如PET(聚对苯二甲酸乙二酯)或Kapton(聚酰亚胺))相比,使用经济,生态的基板(例如纸)具有巨大的潜力。然而,考虑到在电子领域的潜在应用,由于操作过程中的水分和温度引起的纸张粗糙和撕裂构成了主要的技术挑战。使用凹版印刷,苯胺印刷,丝网印刷,胶版印刷,喷墨,导电和介电油墨以及有机聚合物等印刷技术,所有这些印刷技术都具有适用于机器沉积的不同粘度,可以使电子设备在纸质基材上使用;使用该技术的示例产品包括柔性电池,太阳能电池,显示器和生物医学设备。该技术仅表现出少量的缺点,包括导电性差,材料昂贵以及难以进行诸如光刻和真空工艺之类的减法批量工艺。在本文中,作者选择了一种非常规方法,通过调整微电子技术(例如,光刻,金属气相沉积,电镀和蚀刻)以在标准纸张基材上使用的工艺来减少这些缺点的影响。 (C)2015 Elsevier B.V.保留所有权利。

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