Fully differential current-mode MEMS dual-axis optical inclination sensor

摘要

We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R~2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.