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Dual-Axis Test Rig for Mems Tilt Sensors

机译:Mems倾斜传感器的双轴测试台

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The paper addresses the problem of experimental studies of miniature tilt sensors based on low-range accelerometers belonging to Microelectromechanical Systems (MEMS). A custom computer controlled test rig is proposed, whose kinematics allows an arbitrary tilt angle to be applied (i.e. its two components: pitch and roll over the full angular range). The related geometrical relationships are presented along with the respective uncertainties resulting from their application. Metrological features of the test rig are carefully evaluated and briefly discussed. Accuracy of the test rig is expressed in terms of the respective uncertainties, as recommended by ISO; its scope of application as well as the related limitations are indicated. Even though the test rig is mostly composed of standard devices, like rotation stages and incremental angle encoder, its performance can be compared with specialized certified machines that are very expensive. Exemplary results of experimental studies of MEMS accelerometers realized by means of the test rig are presented and briefly discussed. Few ways of improving performance of the test rig are proposed.
机译:该论文解决了基于属于微机电系统(MEMS)的低范围加速度计的微型倾斜传感器的实验研究问题。提出了一种定制的计算机控制的试验台,其运动学特性允许应用任意倾斜角(即其两个分量:在整个角度范围内的俯仰和横滚)。介绍了相关的几何关系以及由于其应用而导致的各个不确定性。测试台的计量功能经过仔细评估和简要讨论。根据ISO的建议,试验台的准确性以不确定性表示。指出了其适用范围以及相关限制。即使测试台大部分由标准设备组成,例如旋转台和增量角度编码器,其性能也可以与非常昂贵的经过专门认证的机器进行比较。介绍并简要讨论了通过测试装置实现的MEMS加速度计实验研究的示例性结果。提出了几种提高测试装置性能的方法。

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