...
首页> 外文期刊>Sensors and Actuators, A. Physical >A new acoustic transducer with a pressure-deformed piezoelectric diaphragm
【24h】

A new acoustic transducer with a pressure-deformed piezoelectric diaphragm

机译:新型带压力变形压电膜片的声换能器

获取原文
获取原文并翻译 | 示例
   

获取外文期刊封面封底 >>

       

摘要

A new design for wide-band acoustic transducers is described. Radial tension is applied to a thin piezoelectric diaphragm with conductive electrodes on the upper and lower surface. One side of the diaphragm is pressurized, elastically deforming the diaphragm into a slightly curved shape. The in-plane static tension is modulated by applying a time-dependent voltage across the electrodes of the piezoelectric diaphragm. The tension modulation causes transverse displacement oscillations of the diaphragm. This actuation takes place in spite of the fact that the piezoelectric diaphragm does not contain a passive elastic layer, which is necessary for actuation by flexure in planar diaphragms. A theoretical quasi-static model using hexagonal symmetry for the piezoelectric material was developed to predict the electromechanical actuation mechanism, and the mode for optimal operation in non-resonant conditions. Piezoelectric diaphragms were fabricated from PVDF film of nominal thickness 40 μm into circular diaphragms 1 cm in diameter. For the pressure-deformed transducers fabricated from PVDF film, displacement amplitudes of 9-14.5 nm/V were observed, and the maximum displacement amplitude took place at the applied tension and static pressure predicted by the model. Additional measurements with conventional flexure-type transducers containing a diaphragm consisting of a layer of PZT and a passive elastic material fabricated using MEMS processes were performed to compare with the transducers fabricated from PVDF film. The displacement amplitude per unit electric field measured for the transducers fabricated from PVDF film was comparable to those measured from conventional PZT flexure-type transducers, despite the fact that the piezoelectric coupling coefficient for PVDF was approximately 100 times smaller than that for PZT.
机译:描述了一种宽带声换能器的新设计。径向张力被施加到一个薄的压电隔膜上,该压电隔膜的上,下表面都有导电电极。隔膜的一侧受压,使隔膜弹性变形为略微弯曲的形状。通过在压电振动膜的电极上施加时间相关的电压来调制面内静态张力。张力调制引起隔膜的横向位移振荡。尽管压电膜片不包含被动弹性层,但是该致动仍然发生,这是通过平面膜片中的挠曲来致动所必需的。建立了使用六边形对称性的压电材料的理论准静态模型,以预测机电致动机理,以及在非谐振条件下最佳运行的模式。压电隔膜由标称厚度为40μm的PVDF薄膜制成直径为1 cm的圆形隔膜。对于由PVDF薄膜制成的压力变形换能器,观察到位移幅度为9-14.5 nm / V,并且最大位移幅度发生在模型预测的施加张力和静压力下。进行常规挠曲型换能器的附加测量,该换能器包含由PZT层组成的膜片和使用MEMS工艺制造的无源弹性材料,以与由PVDF薄膜制成的换能器进行比较。尽管PVDF的压电耦合系数比PZT的压电耦合系数小约100倍,但由PVDF膜制成的传感器所测得的单位电场位移幅度与常规PZT挠曲型传感器所测得的位移幅度相当。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号