MEMS-Based Systems Solutions: High-Performance Accelerometers and Gyros

摘要

Analytical instruments offer a great opportunity for MEMS-based systems solutions, as introduced in the Sensor Magazin 2-2011. The inherent benefit of MEMS being small, robust, low power and low cost along with surprisingly high performance make them ideally suited to hand-held and portable/field useable instruments. These instruments find their way into a broad assortment of applications for solid, liquid and gas analysis including environmental monitoring, process control quality assurance, homeland security and defense.