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Influence of Thickness on Optical Properties of Titanium Layers

机译:厚度对钛层光学性能的影响

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摘要

Titanium layers with different thicknesses of 21, 83.7, and 133 nm and same other deposition conditions were deposited on glass substrates at 300 K, by physical vapor deposition method under high vacuum conditions. The optical reflectance of the layers was measured in the wave length range of 400-800 nm. The optical properties were calculated by using Kramers-Kronig relations. Relation between the optical properties and nanostructure of the layers was investigated. By using Generalized Gradient Approximations in context of plane wave pseudopotentials (norm conserving and ultrasoft) method, band structure calculated and compared with experimental results.
机译:通过高真空条件下的物理气相沉积法,在300 K的玻璃基板上沉积厚度分别为21、83.7和133 nm的钛层,以及其他相同的沉积条件。在400-800nm的波长范围内测量层的光反射率。通过使用Kramers-Kronig关系式计算光学性质。研究了层的光学性质和纳米结构之间的关系。通过在平面波伪势(范数守恒和超软)方法中使用广义梯度逼近,计算能带结构并将其与实验结果进行比较。

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