A novel Fourier transform profilometry based on dual-frequency grating

摘要

The projecting grating method is used to measure the profile of the object. When the object has the steps shape or there are shadows in the grating stripes, the disconnected phase cannot be correctly unwrapped. In order to resolve these problems, the dual-frequency grating is programmed by the computer. And it is projected to the measurement object. The measurement object is placed on the exact rotary platform. After getting two images, the two images are mosaiced, the clear object image modulated by the grating is got. Then a novel Fourier transform profilometry is used to process the image, and the filter is designed to filter the high frequency and the low frequency. The phase difference of high frequency is worked out based on that of the low frequency. At last, the three dimension profile measurement is realized. Comparing with the traditional Fourier transform profile, the method cuts down three times frequency shifting reduces the calculation time and improves filter precision. The result indicates that the method is simple, with high precision. Three dimension profile measurement of the object that has the steps shape or there are shadows in its grating stripes can be successfully resolved.