Influence of microwave plasma parameters on light emission from SiV color centers in nanocrystalline diamond films

摘要

Zero phonon line (ZPL) shape, position and integral intensity of SiV defect center in diamond is presented for nanocrystalline diamond (NCD) films grown at different conditions, NCD films of average grain sizes from similar to 50 nm up to similar to 180 nm have been deposited onto c-Si wafer at substrate temperature of 700 and 850 degrees C from mixture with different CH4 and H-2 ratios using MWCVD process. Light emission of SiV defect center and Raman scattering properties of NCD samples were measured on a Renishaw micro-Raman spectrometer with 488 nm excitation. Scanning electron microscopy images were used for monitoring surface morphology and for the analysis of the average grain sizes. Sample thickness was determined by in situ laser reflection interferometry. Characteristics of SiV ZPL are discussed in light of the morphology, bonding structure and average grain size of NCD films.