1-Hydrocarbylsilatranes as New Precursors for Nanolayers of Polyhydrocarbylsilsesquioxanes

摘要

Network or spherical oligohydrocarbylsilsesquio-xanes when applied on the surface of solid materials form nanolayers, which after heating or irradiation are structured into the corresponding insoluble and nonvolatile polyhydrocarbylsilsesquioxanes necessary for preparation of dielectric coatings and resists for electronic, X-ray, and ionic nanolithography for design of modern electronic devices [1, 2]. We have found that 1-hydrocarbylsilatranes (HS) which have already found wide application in medicine and agriculture [3] are promising precursors for preparation of nanodimensional polyhydrocarbylsilsesquioxane coatings.