Using Real-Time Control for Microprecision

摘要

The demand for miniature plastic parts has grown continuously in re-cent years and,according to market surveys,will continue to grow[1].So-called MEMS(micro-electro-mechani-cal Systems),e.g.read/write heads,mi-crodisplays and pressure sensors that are being used increasingly in all areas rep-resent the largest field of application.The term"microparts"is typically applied to molded parts with dimensions of a few millimeters and part weights less than 100 mg[2].