Low energy X-ray radiation impact on coated Si constructions

摘要

Low energy X-ray radiation impact on the coated Si structures is discussed in this paper. Experimental sandwich structures consisting of amorphous hydrogenated a:C-H or SiO_x-containing DLC films were synthesized on Si <1 1 1> wafers using direct ion deposition method and exposed to low energy (medical diagnostic range) X-ray photons. Irradiation of samples was performed continuously or in sequences and protective characteristics of the irradiated DLC films were investigated. Experimental data were used as the input data for Monte Carlo modelling of X-ray scattering effects in the coated silicon constructions, which affect significantly the "signal to noise ratio" in DLC-coated Si structures proposed for their application in medical radiation detectors. Modelling results obtained in the case of DLC coatings were compared to the results of calculations performed for other commonly used combinations coating-detector material. The evaluation method of coated structures for their possible application in medical radiation detector constructions has been proposed in this paper. It is based on the best achieved compatibility between the appropriate mechanical characteristics, coating's resistance against the radiation damage and the lowest estimated scattering to total dose ratio in the coated radiation sensitive volume.