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Formation model of bulk etching rate for polymer detectors

机译:聚合物探测器体刻蚀速率形成模型

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摘要

Any detector is composed of an enormous number of sensitive microscopic volumes (SMV) mainly in the state "NO" (Katz 1970. Unified Track Theory. In: Seventh International Colloquium on Corpuscular Photography and Visual Solid Detectors. Barcelona, pp. 1-29.). Irradiation evokes some spatial distribution of SMV in the state "Yes". It can be described by the many-hit model of the SMV response (Ditlov, 1980. Theory of spatial calculation of primary action of d-electrons in track detectors with account of multiple scattering. In: Francois, H., et al. (Eds.), Solid State Nuclear Track Detectors. Pergamon Press, Oxford, pp. 131-141.). It appears that the process of etching can be described by its own many-hit model too, when the etching molecule attacks SMV in the state "Yes". As a first our step of research, only the bulk rate V-b was considered. (c) 2005 Elsevier Ltd. All rights reserved.
机译:任何探测器都主要由“ NO”状态(Katz 1970. Unified Track Theory。于:第七届国际物体摄影与视觉固体探测器学术讨论会)中的大量敏感显微体积(SMV)构成,巴塞罗那,第1-29页。 )。辐照引起状态为“是”的SMV的某些空间分布。可以用SMV响应的多次碰撞模型来描述它(Ditlov,1980。考虑多重散射的轨道检测器中d电子主作用的空间计算理论。在:Francois,H.等(编,“固态核径迹检测器”,佩加蒙出版社,牛津,第131-141页。似乎当蚀刻分子以“是”状态攻击SMV时,蚀刻过程也可以用其自身的多次命中模型来描述。作为我们研究的第一步,仅考虑了容积率V-b。 (c)2005 Elsevier Ltd.保留所有权利。

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