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INTERFEROMETRY: Combined interferometer measures absolute distances precisely

机译:干涉仪:组合干涉仪可精确测量绝对距离

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摘要

Under the right environmental conditions, optical interferometers can measure macroscopic distances to nanometer accuracies. As a result, they are used for precision applications from semiconductor-wafer manufacturing to LIGO (the Laser Interferometer Gravitational-Wave Observatory; Hanford, WA, and Livingston, LA). But standard distance-measuring interferometers (DMIs) have a disadvantage: they can only measure relative--not absolute--distances. This limitation means that to measure any distance at all, an interferometer mirror must be moved along the entire distance while fringes are counted. One way around this procedure is to exploit the output of a femtosecond pulsed laser, which consists of many monochromatic modes phase-locked in the optical-frequency domain; for example, an approach based on synthetic-wavelength interferometry (SWI) was capable of measuring absolute distances in a special tunnel of up to 240 m at a 50 (mu)m resolution. But is there a way to achieve nanometer-scale resolution while simultaneously measuring long (meter- or kilometer-scale) absolute distances?
机译:在适当的环境条件下,光学干涉仪可以测量到纳米精度的宏观距离。结果,它们被用于从半导体晶片制造到LIGO(激光干涉仪重力波天文台;华盛顿州汉福德和路易斯安那州利文斯顿)的精密应用。但是标准的测距干涉仪(DMI)有一个缺点:它们只能测量相对而非绝对距离。这种限制意味着要测量任何距离,都必须在计数条纹的同时沿整个距离移动干涉镜。解决此问题的方法之一是利用飞秒脉冲激光器的输出,该激光器由许多在光频域中锁相的单色模式组成;例如,基于合成波长干涉法(SWI)的方法能够以50μm的分辨率测量长达240 m的特殊隧道中的绝对距离。但是,有没有一种方法可以在测量长(米或千米)绝对距离的同时达到纳米级分辨率呢?

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