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Rapid fabrication of nickel molds for prototyping embossed plastic microfluidic devices

机译:快速制造用于压花塑料微流体装置原型的镍模具

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The production of hot embossed plastic microfluidic devices is demonstrated in 1-2 h by exploiting vinyl adhesive stickers as masks for electroplating nickel molds. The sticker masks are cut directly from a CAD design using a cutting plotter and transferred to steel wafers for nickel electroplating. The resulting nickel molds are used to hot emboss a variety of plastic substrates, including cyclo-olefin copolymer and THV fluorinated thermoplastic elastomer. Completed devices are formed by bonding a blank sheet to the embossed layer using a solvent-assisted lamination method. For example, a microfluidic valve array or automaton and a droplet generator were fabricated with less than 100 μm x-y plane feature resolution, to within 9% of the target height, and with 90 + 11 % height uniformity over 5 cm. This approach for mold fabrication, embossing, and bonding reduces fabrication time and cost for research applications by avoiding photoresists, lithography masks, and the cleanroom.
机译:通过使用乙烯基胶粘剂作为电镀镍模具的掩模,在1-2小时内证明了热压纹塑料微流体装置的生产。使用切割绘图仪直接从CAD设计中切割不干胶掩模,并转移到钢晶圆上进行镍电镀。所得的镍模具用于热压印各种塑料基材,包括环烯烃共聚物和THV氟化热塑性弹性体。通过使用溶剂辅助层压法将坯料片粘合到压纹层上来形成完整的器件。例如,制造的微流体阀阵列或自动机以及液滴发生器的x-y平面特征分辨率小于100μm,在目标高度的9%以内,并且在5 cm上具有90 + 11%的高度均匀性。通过避免使用光致抗蚀剂,光刻掩模和无尘室,这种用于模具制造,压花和粘合的方法减少了制造时间和研究应用的成本。

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