机译:沉积条件对低压化学气相沉积低应力氮化硅薄膜力学性能的影响
Department of Chemical Engineering and Materials Science, 151 Amundson Hall 421 Washington Ave., University of Minnesota, Minneapolis, Minnesota 55455;
机译:Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition
机译:Microstructure and dielectric properties of silicon nitride films deposited by electron cyclotron resonance plasma chemical vapor deposition
机译:Dielectric properties of silicon nitride films deposited by microwave electron cyclotron resonance plasma chemical vapor deposition at low temperature
机译:Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor