Structural analysis of amorphous carbon and related films using new band in Raman spectra

摘要

The structures of amorphous carbon and related films are evaluated using a new Raman band. The new band can be assigned as being due to the presence of sp3-hybridized amorphous carbon. The relationship between the peak position of the 6-band and intensity ratio I{sub}(new)/(I{sub}D+I{sub}g) was confirmed. In addition, the structural classification of the amorphous carbon and related films was conducted using the relationship between hydrogen content and I{sub}(new)/(I{sub}D+I{sub}G).