Development of Superimposed PBIID Equipment for Uniform and Superthick DLC Coatings

摘要

Uniform superthick DLC coatings were prepared on mechanical parts by superimposed the PBIID method with high repetition pulsed plasma. We have established a coating process of sufficient adhesion using hydrocarbon and metal-organic compound gases. The gas pressure ranged from 0.1 to 3 Pa and the plasma repetition rate was 500 to 4000 Hz. Ion implantation led to a graded interface and also dramatically reduced residual stress to several MPa. Thus, superthick DLC (over 100 μm) was realized.