Low-current focused-ion-beam induced deposition of three-dimensional tungsten nanoscale conductors

摘要

We have used focused-ion- beam assisted chemical vapour deposition to grow 'flying' tungsten nanorods - i.e. nanoscale wiring which is not lying on the substrate surface. Flying rods of cross- sectional diameter of the order 100 nm were grown with a 1 pA gallium ion-beam current. The electrical resistivity of such flying nanorods is comparable to that of nanowires grown on the substrate surface. Such flying nanorods could be used to make electrical contact to single vertical nanocrystals.