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A temperature window for ethanol chemical vapor deposition of a carbon nanotube array catalyzed by Co particles

机译:Co颗粒催化碳纳米管阵列乙醇化学气相沉积的温度窗口

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With ethanol chemical vapor deposition (CVD), vertically grown carbon nanotube (CNT) arrays were synthesized controllably on Si substrates, using cobalt (Co) as a catalyst. The effect of the Co particle size, growth temperature and ethanol pressure on nanotube growth has been investigated. It is shown that a vertically grown nanotube array can be grown within a temperature window from 500 to 700 degrees C. Our experiment offers a new route by which CNT arrays might be continuously and inexpensively produced at a relatively low temperature and also suggests that ethanol CVD is a potential method for low-temperature growth of CNTs.
机译:通过乙醇化学气相沉积(CVD),使用钴(Co)作为催化剂在Si基板上可控地合成了垂直生长的碳纳米管(CNT)阵列。研究了Co粒径,生长温度和乙醇压力对纳米管生长的影响。结果表明,垂直生长的纳米管阵列可以在500至700摄氏度的温度范围内生长。我们的实验提供了一条新的途径,通过该途径,可以在相对较低的温度下连续且廉价地生产CNT阵列,并且还提出了乙醇CVD是碳纳米管低温生长的潜在方法。

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