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Bolometer with thermosensitive layer made of vanadium oxide VO _x

机译:带有热敏层的氧化钒VO_x测厚仪

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The electrical parameters of the thermosensitive layer of VO _x bolometer and the morphology of its surface have been studied. The relative measurement error caused by the VO _x oxide layer has been determined. Calculated and experimental data on the heating of the VO _x layer by 1 and 200°C in the wavelength ranges 0. 5-3. 39 μm and 5. 0-12 μm are given as a function of pulse duration in the range of 1-10 ~(-9) s on various substrates. The time constant and voltaic sensitivity of the bolometer have been analyzed as a function of the size of the receiving pad and substrate material. The bolometer time constant, voltaic sensitivity, and equivalent voltage values of fundamental noise were calculate as a function of sizes of the receiving pad, substrate material, and frequency of recorded radiation. The values of specific heat flow and bolometer detectivity at frequencies of 1, 10, and 20 Hz measured on various dielectric substrates are presented. The bolometer modular design consists of a sealed housing with a receiver and resistance-to-voltage converter. Voltage values from the bolometer output are presented as a function of the acting constant and pulse radiation.
机译:研究了VO_x辐射热计的热敏层的电学参数及其表面形貌。已经确定了由VO_x氧化物层引起的相对测量误差。关于在1和200°C下在0. 5-3波长范围内加热VO_x层的计算和实验数据。给出了39μm和5。0-12μm作为脉冲持续时间的函数,在各种基板上范围为1-10〜(-9)s。已经分析了辐射热测量仪的时间常数和伏安敏感性,其取决于接收垫和基板材料的尺寸。计算辐射热计的时间常数,伏安灵敏度和基本噪声的等效电压值,取决于接收垫的尺寸,基板材料和记录的辐射频率。给出了在各种介电基片上测得的1 Hz,10 Hz和20 Hz频率下的比热流量和辐射热检测值。辐射热计的模块化设计包括带有接收器和电阻-电压转换器的密封外壳。来自测辐射热计输出的电压值表示为作用常数和脉冲辐射的函数。

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