We numerically assess the light propagation and distribution characteristics of electromagnetic fields on nanopores formed in dielectric and metal/ dielectric membranes using a frequency-domain finite element method ( 3D full-wave electromagnetic field simulation). Results of such studies were used to identify aluminum as an ideal material for use in optically thick metal/ dielectric membranes. The comparison between SiN and Al/ SiN membranes ( with and without a submicron sized aperture) was numerically and experimentally shown to verify the effect of optically thick metal layers on light propagation and fluorescence excitation. The cut-off behavior for Al/ SiN membranes with varying pore diameters was investigated in terms of light propagation, distribution of electromagnetic fields, and light attenuation characteristics.
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