Organic nanostructures on silicon, created with semitransparent polystyrene spheres and 248 nm laser pulses

摘要

Arrays of nanostructures are made starting with a template of close-packed, polystyrene spheres on a silicon surface. The spheres are either 1.091 or 2.99 mu m in diameter ( d) and are of polystyrene ( PS). They are irradiated with a pulse of either 308 or 248 nm light to which they are transparent and semitransparent, respectively. A transparent sphere with d = 1.091 mu m diameter concentrates incident light onto a small substrate area. As has been previously reported, that creates silicon nanobumps that rise from circular craters. At 248 nm and d = 2.99 mu m, the light energy is mainly absorbed, destroys the sphere, and leaves a shrunken mass ( typically about 500 nm wide and 100 nm high) of organic material that is probably polystyrene and its thermal degradation products. At 248 nm and d = 1.091 mu m, the residual organic structures are on the order of 300 nm wide and 100 nm high. A distinctive feature is that these organic structures are connected by filaments that are on the order of 50 nm wide and 10 nm high. Filaments form because the close-packed PS spheres expand into each other during the early part of the laser pulse, and then, as the main structures shrink, their viscoelasticity leads to threads between them. Our results with 248 nm and d = 1.091 mu m differ from those described by Huang et al with 248 nm and d = 1.0 mu m. Future studies might include the further effect of wavelength and fluence upon the process as well the use of other materials and the replacement of nanospheres by other focusing shapes, such as ellipsoids or rods.