PERFORMANCE VERIFICATION OF HIGH RESOLUTION ANGLE MEASURING EQUIPMENT BY LASER INTERFEROMETRY TECHNIQUE

摘要

At present manufacturing sectors are capable to produce complex components within small tolerance zone in the tune of nano-range at one machining center due to vast advancement of digital electronics and microprocessor. To measure those components high resolution measuring equipment are needed both for linear and angular measurement. For small angle measurement, in the sub-second range, micro-optic auto-collimator or micro-optic angle dekker are used. The performance of these measuring systems are not perfectly accurate due to the error in measuring scale which will change over time to time due to wear, damage and effect of environmental conditions. Analysis of these errors using a laser measurement system provides the user with a way to achieve better accuracy and hence higher quality output from measuring process. In this communication, an innovative technique to measure the angular scale error of auto-collimator and angle dekker by a laser interferometer calibration system has been discussed and the performance accuracy of those equipment has been verified.