Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing

摘要

Optical methods are of choice in a huge number of applications. In particular, those instruments based on vertical scanning methods provide extremely fast, non-contact characterization of surface topography. However some limitations are present. Among them, maximum detectable slope is limited (generally < 30 degrees). Local loss of signal, resulting from this limited detection, originates data files containing void pixels, which eventually provide poor surface characterization. This work presents an original approach to overcome instrumental limitation on the maximum detectable slope. The method presented here is based on a software tool that processes images taken with controlled tilt, and returns a high-quality 3D profile of the sample being investigated. Experimental evidence is given with reference to the case of a Vickers indentation on steel.