Thermal effusivity measurement based on analysis of 3D heat flow by modulated spot heating using a phase lag matrix with a combination of thermal effusivity and volumetric heat capacity

摘要

The study goal was to establish a standard industrial procedure for the measurement of thermal effusivity by a thermal microscope (TM), using a periodic heating method with a thermoreflectance (TR) technique. To accomplish this goal, a working group was organized that included four research institutes. Each institute followed the same procedure: a molybdenum (Mo) film was sputtered on the surface of Pyrex, yttria-stabilized zirconia (YSZ), alumina (Al2O3), Germanium (Ge), and silicon (Si) samples, and then the phase lag of the laser intensity modulation was measured by the resultant surface temperature. A procedure was proposed to calibrate the effect of 3D heat flow, based on the analytical solution of the heat conduction equation, and thermal effusivity was measured. The derived values show good agreement with literature values. As a result, the TM calibration procedure can be recommended for practical use in measuring the thermal effusivity in a small region of the materials.