首页> 外国专利> Thermal mass flow sensor has heating element thermally connected to flow sensor tube, temp. sensors thermally connected to tube at heating element ends, heat-conducting earthing parts

Thermal mass flow sensor has heating element thermally connected to flow sensor tube, temp. sensors thermally connected to tube at heating element ends, heat-conducting earthing parts

机译:热质量流量传感器的加热元件与温度传感器管热连接。传感器在加热元件末端与管热连接,导热接地部件

摘要

The thermal mass flow sensor has a flow sensor tube (12) with an internal flow channel between input and output ends and a heating element (16) in thermally conducting connection with only part of the tube to heat the medium (28) flowing through it. Two temp. sensors (34) are thermally connected to the tube at the ends of the heating element and two thermally conducting earthing parts are used to produce inlet and outlet reference signals.
机译:热质量流量传感器具有在输入端和输出端之间具有内部流动通道的流量传感器管(12)和仅与该管的一部分导热连接以加热流经其中的介质(28)的加热元件(16)。 。两个温度传感器(34)在加热元件的末端热连接到管子上,两个导热的接地部分用于产生入口和出口参考信号。

著录项

  • 公开/公告号DE10029395A1

    专利类型

  • 公开/公告日2000-12-28

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC. ANDOVER;

    申请/专利号DE2000129395

  • 发明设计人 MAGGINIS THOMAS O.;BAXTER WILFRED J.;

    申请日2000-06-15

  • 分类号G01F1/696;G01K7/16;G01F1/688;

  • 国家 DE

  • 入库时间 2022-08-22 01:09:45

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