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An improved coaxial probe technique for measuring microwave permittivity of thin dielectric materials

机译:一种改进的同轴探针技术,用于测量薄介电材料的微波介电常数

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摘要

A practical coaxial probe technique for convenient, fast and accurate measurements of thin dielectric materials is presented in this paper. The thin dielectric samples, backed by a short circuit, are placed flush with the probe. The complex permittivities of the samples are determined from the coaxial aperture reflection coefficient, which is measured by a vector network analyser. In order to realize fast measurements, only the fundamental coaxial mode is considered in the determination of the permittivity of a sample from the measured reflection coefficient. However, in calibration computations, both the fundamental mode and higher-order modes are considered in order to ensure that the measurement system is accurately calibrated. Two practical measurement set-ups are specifically developed, for thin solid samples and thin liquid samples, respectively, in order to minimize various measurement errors and to make the measurements convenient. To validate this technique, experimental measurements are carried out on several different dielectric materials, including low-, medium- and high-permittivity materials. The measured data are found to be in good agreement with the known data. The limitations of this technique are also discussed.
机译:本文提出了一种实用的同轴探针技术,用于方便,快速和准确地测量薄介电材料。带有短路支持的薄介电样品应与探头齐平放置。样品的复介电常数由同轴孔径反射系数确定,该系数由矢量网络分析仪测量。为了实现快速测量,在根据测得的反射系数确定样品的介电常数时,仅考虑基本同轴模式。但是,在校准计算中,要同时考虑基本模式和高阶模式,以确保对测量系统进行精确校准。专门针对稀薄的固体样品和稀薄的液体样品专门开发了两种实用的测量设置,以最大程度地减少各种测量误差并简化测量过程。为了验证该技术,对几种不同的介电材料(包括低介电常数,中介电常数和高介电常数的材料)进行了实验测量。发现测量数据与已知数据非常吻合。还讨论了此技术的局限性。

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