A concept for automated nanoscale atomic force microscope (AFM) measurements using a priori knowledge

摘要

The nanometer coordinate measuring machine (NCMM) is developed for comparatively fast large area scans with high resolution. The system combines a metrological atomic force microscope (AFM) with a precise positioning system. The sample is moved under the probe system via the positioning system achieving a scan range of 25 X 25 X 5 mm~(3) with a resolution of 0.1 nm. A concept for AFM measurements using a priori knowledge is implemented. The a priori knowledge is generated through measurements with a white light interferometer and the use of CAD data. Dimensional markup language is used as a transfer and target format for a priori knowledge and measurement data. Using the a priori knowledge and template matching algorithms combined with the optical microscope of the NCMM, the region of interest can automatically be identified. In the next step the automatic measurement of the part coordinate system and the measurement elements with the AFM sensor of the NCMM is done. The automatic measurement involves intelligent measurement strategies, which are adapted to specific geometries of the measurement feature to reduce measurement time and drift effects.