Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

摘要

Determination of a phase correction is necessary when making interferometric measurements of gauge blocks with an auxiliary platen. The phase correction compensates for the differences in the reflecting properties of the gauge block and the platen surfaces. Different phase corrections are reported for gauge blocks of different manufacturers, made from different materials and with different surface roughness compared to the platen. In this paper, the process of selection of the best surface roughness parameter and the influence of different complex refractive indices of the same type of material are analysed. The new surface roughness parameter based on the difference between the weighted mean of maximum and minimum asperities of 3D surface roughness measured by a modernized Linnik phase shifting interferometer is introduced. The results of comparison of the phase correction values calculated from the difference between the weighted mean values and calculated from stack method measurements are presented and discussed. The complementary method of phase correction measurement based on the cross-wringing method with the use of the modernized phase shifting Kosters interferometer is proposed.