Determination of the phase-change correction used for gauge block calibration by optical interferometry technique

摘要

Phase-change corrections used for gauge block calibration for gauge block and base plate of various materials were investigated. Experimentally determined phase-change corrections obtained from three different gauge block interferometer (GBI) were compared. Experimental result illustrate that phase-change correction is characteristic of the interferometer system. The values are appeared to be inconsistent difference for all materials. Gauge block calibration after applying phase-change correction for all gauge block interferometer system was compared and En ratio are well below 1.