On-line depth measurement for laser-drilled holes based on the intensity of plasma emission

摘要

The direct time-resolved depth measurement of blind holes is extremely difficult due to the short time interval and the limited space inside the hole. This work presents a method that involves on-line plasma emission acquisition and analysis to obtain correlations between the machining processes and the optical signal output. Given that the depths of laser-machined holes can be estimated on-line using a coaxial photodiode, this was employed in our inspection system. Our experiments were conducted in air under normal atmospheric conditions without gas assist. The intensity of radiation emitted from the vaporized material was found to correlate with the depth of the hole. The results indicate that the estimated depths of the laser-drilled holes were inversely proportional to the maximum plasma light emission measured for a given laser pulse number.