Application of an optical interferometer for measuring the surface contour of micro-components

摘要

The application of an optical interferometric system using a Mireau objective to measure the surface profile of micro-components is described. The proposed system produces a uniform monochromatic illumination over the test area and introduces an interference fringe pattern localized near the test surface. Both the interference fringes and the 2D image of the test surface can be focused by an infinity microscope system consisting of a Mireau objective and a tube lens. A piezoelectric transducer (PZT) attached to the Mireau objective can move precisely along the optical axis of the objective. This enables the implementation of phase-shifting interferometry without changing the focus of a CCD sensor as the combination of the Mireau objective and the tube lens provides a depth of focus which is deep in comparison to the phase-shifting step. Experimental results from surface profilometry of the protrusion/undercut of a polished fibre within an optical connector and of the curved surface of a micromirror demonstrate that features in the order of nanometres are measurable. Measurements on standard blocks also show that the accuracy of the proposed system is comparable to an existing commercial white-light interferometer and a stylus profilometer.