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The asymmetric effect of stress in the morphological instability of a growing thin film

机译:应力对生长中的薄膜形态不稳定性的不对称影响

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Many experiments have shown that films growing under tensile stress and compressive stress have different morphological instability behaviours. Departing from earlier theoretical works, which treated surface diffusion as the only kinetic process for bringing out the morphology change and assumed uniform growth rate along the surface, this paper studies the coupling between the deposition process and surface diffusion, to offer another possible mechanism for the asymmetric effect of stress. A nonlinear kinetic law, in which the activation energy of growth process is modified by local stress, is adopted. Linear stability analysis shows that if the growth rate is enhanced by tensile stress while being slowed by compressive stress, the surface instability, for a growing film under tension, could either be fully suppressed for perturbations of any wavelength, or occurs only when the wavelength is within an intermediate range; if the film is under compressive stress, the instability behaviour is similar to that obtained from considering surface diffusion alone, but with different amplitude on growth rate. Two characteristic lengths, one characterizing the competition between surface energy increase and strain energy reduction and the other representing the competition between surface diffusion and growth process, are identified. The thin film instability behaviour is largely determined by the ratio of these two lengths.
机译:许多实验表明,在拉伸应力和压缩应力下生长的薄膜具有不同的形态学不稳定性行为。与早期的理论工作不同,本文将表面扩散视为引起形态变化并假定沿表面均匀增长率的唯一动力学过程,本文研究了沉积过程与表面扩散之间的耦合,从而为沉积过程提供了另一种可能的机制。应力的不对称效应。采用非线性动力学定律,其中生长过程的活化能被局部应力改变。线性稳定性分析表明,如果通过拉伸应力提高生长速率,而通过压缩应力使生长速率降低,则对于处于拉伸状态的生长膜,表面不稳定性可以完全抑制任何波长的扰动,或者仅在波长为在中等范围内;如果薄膜处于压缩应力下,则其不稳定性行为类似于仅考虑表面扩散所获得的不稳定性行为,但是其增长率却不同。确定了两个特征长度,一个代表表面能增加与应变能减少之间的竞争,另一个代表表面扩散与生长过程之间的竞争。薄膜不稳定性行为在很大程度上取决于这两个长度的比率。

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