Liquid-diaphragm interaction of micropump

摘要

This paper employs a thickness-averaged shallow water model to approximate periodical flows in a piezoelectric micropump. The fluid pressure equation is combined with the vibration equation of silicon diaphragm to construct a liquid-solid coupled equation. Numerical results of mode analysis of the coupled system indicate that the natural frequencies of coupled system are much lower than those of the non-coupled system. The relationships of the first order amplitude-frequency of the silicon diaphragm, and the flow rate-frequency of micropump are also given in this paper.