On the characterization of metallic superlattice structures by X-ray diffraction

摘要

To solve the problem on the microstructural characterization of metallic superlattices, taking the NiFe/Cu superlattices as example, we show that the structures of metallic superlattices can be characterized exactly by combining low-angle X-ray diffraction with high-angle X-ray diffraction. First, we determine exactly the total film thickness by a straightforward and precise method based on a modified Bragg law from the subsidiary maxima around the low-angle X-ray diffraction peak. Then, by combining with the simulation of high-angle X-ray diffraction, we obtain the structural parameters such as the superlattice period, the sublayer and buffer thickness. This characterization procedure is also applicable to other types of metallic superlattices.