SURFACE PLASMON RESONANCE SENSORS USING SILICA-ON-SILICON OPTICAL WAVEGUIDES

摘要

Surface plasmon resonance (SPR) sensors made by multi-mode silica-on-silicon channel waveguides are investigated theoretically and experimentally. Promising sensing characteristics, with sensitivity up to 4547 nm/RIU, are observed over a wide detection range without a conventional tuning-layer design. The Si-based device-fabrication process offers great potential for high-level sensor integration.