3D SIMULATIONS OF ELECTRICALLY LARGE THIN PLATES USING THE HYBRID PSTD-FDTD ALGORITHM

摘要

Many optical and electromagnetic applications involve large thin plates, which include planar waveguides, diffractive optical elements, photo masks, filters, and so forth. Typically, those structures have a relatively small thickness and a very large surface. Three-dimensional (3D) simulation of those thin plates using FDTD, which requires a large sampling rate, is sometimes unpractical due to the memory requirement. In this paper, we investigate 3D simulations of electrically large thin plates using the hybrid PSTD-FDTD method. As an example, we study the near-field scattering of a photo mask and compare the hybrid method with the FDTD method.