CHARACTERIZATION OF SrTiO_3 THIN FILMS AT MICROWAVE FREQUENCIES USING COPLANAR WAVEGUIDE LINEAR RESONATOR METHOD

摘要

Experimental characterization of the dielectric properties of a SrTiO_3 (STO) thin film in the microwave frequency range at room temperature is presented. The coplanar waveguide linear resonator technique, which is already well-established for thick film characterization, was tailored and improved to allow thin film measurements. Experimental results are in very good agreement with theoretical analysis. Using this approach, a relative dielectric constant of 95 and a loss tangent less than 10~(-3) were measured for a STO film with 4.2μm of thickness deposited by radio frequency (RF) magnetron sputtering.