Benchmarks for a New Era in Quantitative S/TEM: Resolution, Sensitivity and Precision

摘要

Recent advances in scanning/transmission electron microscopy (S/TEM) achieved by the TEAM Project have established new benchmarks in quantitative microscopy for spatial resolution (50 pm), sensitivity (single atom detection of light and heavy elements), and measurement precision (better than 5 pm) The achievements of the TEAM Project have been enabled by new technological developments, many of which have been incorporated into the second generation Titan G2 platform, leading to results such as the exit wave reconstruction of graphene seen on the cover of this Supplement.