Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

摘要

A novel InP-based microactuator, which is actuated by electrostatic means, has been proposed, designed, fabricated, and characterized for tuning applications in the 1.5 μm wavelength domains. Its structural design is based on the global optimization method. The tunable device is a big square membrane, which is supported by four identical cantilever beams. The three alternating layers Si{sub}3N{sub}4/SiO{sub}2 as a distributed Bragg reflector (DBR) mirror, which were previously reported, have been formed on the top of the membrane. Based on the optical interfer-ometric measurements, the proposed Fabry-Perot filter has demonstrated a maximum deflection of ~321 nm with an applied voltage up to 12 V, an average sensitivity of ~27 nm/V, a pull-in voltage of 12.7 V, and a release voltage of 10.7 V. It is also observed that its natural frequency is 88.4 kHz. This measured frequency implies that the tuning speed of our device is fast for optical operations within 0.01 ms. In addition, our device's mirror remains so flat with a good planarity of 0.07°, which is strictly required for the filter's optical performance. This optical performance can be achieved, when the micromachined structure has a tuning displacement up to ~ 38 nm with a low tuning voltage up to 5 V. When compared with the finite element models (FEM), which were generated by the commercialized software, Coventor(tm), our experimental results agree well in terms of the natural frequency, pull-in voltage and deflections. Thus, our tunable filter, which is based on the optimized design, enables better performances including reduced actuation voltages, large pull-in voltage, improved device reliability, and fast switching times. Our device can also quickly snap back to the original position. In addition, the undesired spring-softening effect has been reduced.