Metal-organic chemical vapor deposition of Sr-Co-Fe-O films on porous substrates

摘要

Aerosol-assisted chemical vapor deposition using the beta-diketonate precursors Sr(tmhd)(2) . 2H(2)O, Fe(tmhd)(3), and Co(tmhd)(3) was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFei-yO3-delta onto porous alpha-Al2O3 substrates. Single-phase SrCoyFei-yO3-delta perovskite films were obtained at a deposition temperature of 550 degrees C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films, The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric pressure, and led to a supported film which was leak-tight to N-2 flow. References: 19