Examples of Applications with the Software Package MAGNILOG, Intended to Establish Data Logger Systems for Semiconductor Production

摘要

Recently, in the semiconductor manufacturing business world, the wafer diameters have tended to be extended (from 6 inches → 8 inches → 12 inches) and the automation and unification of production control systems have been promoted. While a variety of system developments is being promoted, the Equipment Engineering System (EES) is presently attracting general interest from this business world all over. The EES is a system intended to attain a higher productivity while responding to future trends toward finer semiconductor process rules (wiring width for patterns). In this connection, activities for software standardization are becoming prominent. In regard to such trends toward standardization, Meidensha Corporation has developed the data logger system for semiconductor manufacturing equipment, MAGNILOG, as a product that can be a platform for the EES. This paper outlines the system and introduces some examples of applications.