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首页> 外文期刊>Materials science in semiconductor processing >Influence of molar concentration on the physical properties of nebulizer-sprayed ZnO thin films for ammonia gas sensor
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Influence of molar concentration on the physical properties of nebulizer-sprayed ZnO thin films for ammonia gas sensor

机译:摩尔浓度对雾化器喷涂的用于氨气传感器的ZnO薄膜的物理性能的影响

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摘要

Zinc oxide (ZnO) thin films were deposited by nebulizer spray pyrolysis technique with different molar concentrations of 0.05 M, 0.10 M and 0.15 M. The films were characterized by structural, morphological, electrical and optical properties. X-ray diffraction confirms that the all films are polycrystalline in nature with hexagonal crystal structure having preferential orientation along (002) plane and the maximum crystallite size is found to be ~77 nm. The band gap energy increases with molar concentration and reaches a maximum value of 3.2 eV at 0.15 M. Room temperature photoluminescence measurements were performed and band to band emission energies of ZnO films were determined. High resolution scanning electron microscopy shows the uniform distribution, densely packed grains with a plate like structure of ~55 nm (0.05 M).
机译:采用雾化器喷雾热解技术沉积了摩尔浓度分别为0.05 M,0.10 M和0.15 M的氧化锌(ZnO)薄膜。该薄膜具有结构,形态,电学和光学特性。 X射线衍射证实,所有膜本质上都是多晶的,具有沿(002)面优先取向的六边形晶体结构,并且发现最大微晶尺寸为〜77nm。带隙能量随摩尔浓度的增加而增加,在0.15 M时达到3.2 eV的最大值。进行了室温光致发光测量,并确定了ZnO薄膜的带间发射能。高分辨率扫描电子显微镜显示出均匀分布的,密集堆积的晶粒,具有约55 nm(0.05 M)的板状结构。

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